The parameters of ion flow at low-temperature (400°C) nitriding of austenitic stainless steel in the plasma of a continuous electron beam are determined, at which the effect of ion sputtering of the surface is minimized and the maximum speed of nitriding of steel is provided. Nitriding in the plasma of a pulsed (0.1 ms) electron beam with a high pulse duty cycle (~30) does not prevent diffusion saturation of steel at a high pulse current density of ions, which confirms the dominant role of neutral atomic nitrogen in the nitriding process.
